SPIN-3000T

SPIN-3000T

详细说明

    SPIN-3000T可实现从碎片到最大8英寸试料的工程,可安装Dispenser,并通过触屏电脑,可管理和操作配方。

 

Type

Spin system

Substrate size

piece ~ up to 8" circle

Rotation speed

300 ~ 8,000rpm(@without load) an error of less than 1%
AC Servo Motor(100W/400W)

Spin state

50steps, 20recipes (digital type)

Bowl size

12", Stainless steel

Acceleration / Deceleration rate

Variable

Chuck material

Anodized AL, Acetal

Electric power

220V, 5A

Oiless vacuum pump pressure

650mmHg

Options

Number of Dispenser nozzle
Type of chemical
Drain type
etc.

 

 

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