SPIN-1200T

SPIN-1200T

详细说明

SPIN-1200T可实现从碎片到最大4英寸试料的涂层,设备尺寸小,触屏形式操作方便,适用于学校研究室。

 

Type

Spin system

Substrate size

piece ~ up to 4" circle

Rotation speed

300 ~ 7,000rpm(@without load) an error of less than 1%
DC Servo Motor

Spin state

50steps, 20recipes (digital type)

Bowl size

9", Acetal

Acceleration / Deceleration rate

Variable

Chuck material

Anodized AL, Acetal

Electric power

220V, 5A

Oiless vacuum pump pressure

-650mmHg

Dimensions(mm)

230(D)x340(W)x260(H)

 

 

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