SPIN-5000A

SPIN-5000A

详细说明

SPIN-5000A可根据用户需求进行制作,其为符合大型尺寸的型号,其中可运用四角样品应对系统(Cover system和旋转)功能。

 

Type

Spin system

Substrate size

piece ~ up to 12" circle

Rotation speed

300 ~ 3,000rpm(@without load) an error of less than 1%
AC Servo Motor (400W)

Spin state

50steps, 20recipes (digital type)

Bowl size

12", Stainless steel

Acceleration / Deceleration rate

Variable

Chuck material

Anodized AL, Acetal

Electric power

220V, 5A

Oiless vacuum pump pressure

-650mmHg

Options

Number of Dispenser nozzle
Type of chemical
Drain type
etc.
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