SPIN-3000D

SPIN-3000D

详细说明

SPIN-3000D可实现从碎片到最大6英寸试料的涂层,操作方便,适用于学校研究室。

 

 

Type

Spin system

Substrate size

piece ~ up to 6" circle

Rotation speed

300 ~ 7,000rpm(@without load) an error of less than 1%
DC Servo Motor

Spin state

50steps, 20recipes (digital type)

Bowl size

12", Stainless steel

Acceleration / Deceleration rate

Variable

Chuck material

Anodized AL, Acetal

Electric power

220V, 5A

Oiless vacuum pump pressure

-650mmHg

Dimensions(mm)

390(D)x570(W)x280(H)

 

 

 

 

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