MDA-12SA

MDA-12SA

详细说明

    MDA-12SA为半自动型,通过操纵棒控制Stage,可实现最大12英寸的试料,适用于研究所或企业准量产/量产线上

 

 

Type

Semi-Auto (Joystick control)

Mask size

up to 13" x 13"

Substrate size

piece to 12" x 12"

UV lamp & Power

2kW & power supply
5kW & Power supply

Uniform beam size

13.25" x 13.25"

Beam Uniformity

<±5%

Beam wavelength

350 ~ 450nm

365nm Intensity

15 ~ 20mW/cm2 (2kW)
25 ~ 60mW/cm2 (5kW)

Alignment accuracy

1um

Process resolution

1um@1um PR thickness with vacuum contact

Process mode

Soft, Hard, Vacuum contact & Proximity

Substrate chuck moving

x,y,z & θ (Motorized)

Frame

Anti-Vibration system

Options

CCD BSA
UV Intensity meter
etc.

上一条: MDA-2000SA 下一条: MDA-80SA