MDA-80SA

MDA-80SA

详细说明

    MDA-80SA为半自动型,通过操纵棒控制Stage,可实现最大8英寸的试料,适用于研究所或企业准量产/量产线上。
 

Type

Semi-Auto (Joystick control)

Mask size

up to 9" x 9"

Substrate size

piece to 8" x 8"

UV lamp & Power

2kW & power supply

Uniform beam size

10.25" x 10.25"

Beam Uniformity

<±3~5%

Beam wavelength

350 ~ 450nm

365nm Intensity

15 ~ 25mW/cm2

Alignment accuracy

1um

Process resolution

1um@1um PR thickness with vacuum contact

Process mode

Soft, Hard, Vacuum contact & Proximity

Substrate chuck moving

x,y,z & θ (Motorized)

Frame

Anti-Vibration system

Options

CCD BSA
UV Intensity meter
etc.

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