MDA-60MS

MDA-60MS

详细说明

       MDA-60MS的Z- axis Motion采用发动机启动,并使用了本公司研发的Vision程序,可实现最大6英寸的试料。
      其中设备尺寸小,基本安装有防尘机制,适用于学校、研究所和企业的准量产线上。

Type

Manual (PC control)

Mask size

up to 7" x 7"

Substrate size

piece to 6" x 6"

UV lamp & Power

1kW & power supply

Uniform beam size

7.25" x 7.25"

Beam Uniformity

<±5%

Beam wavelength

350 ~ 450nm

365nm Intensity

15 ~ 25mW/cm2

Alignment accuracy

1um

Process resolution

1um@1um PR thickness with vacuum contact

Process mode

Soft, Hard, Vacuum contact & Proximity

Substrate chuck moving

x,y(Manual), z, θ (Motorized)

Options

CCD BSA
UV Intensity meter
etc.

Frame

Anti vibration table

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