MDA-150

MDA-150

详细说明

    MDA-150光罩对准机(Mask Aligner)可进行根据用户的用途,选择各种类型设备的一对一制作, 并可实现从碎片到最大6英寸试料的工程。适用于学校研究室、研究所或企业的准量产线上。

 

Type

Manual

Mask size

up to 7" x 7"

Substrate size

piece to 6"

UV lamp & Power

500W, 1kW & Digital power supply

Uniform beam size

6.25" x 6.25

Beam Uniformity

<±5%

Beam wavelength

350 ~ 450nm

365nm Intensity

~50mW/cm2

Alignment accuracy

1um

Process resolution

1um@1um PR thickness with vacuum contact

Process mode

Soft, Hard, Vacuum contact & Proximity

Substrate chuck moving

x,y,z & θ (motorized)

Options

CCD BSA

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