MDA-400M

MDA-400M

详细说明

        MDA-400M是价格合理,并运用了PLC控制方式的Leveling系统的光罩对准机(Mask Aligner),可实现最大4英寸的试料。其中设备尺寸小,基本安装有防尘机制,并运用了触屏UI,从而可简便操作,适用于学校和研究所等。

Type

Fully manual (Mask Aligner)

Mask size

up to 5" x 5"

Substrate size

piece to 4" dia

UV lamp & Power

350W & power supply

Uniform beam size

4.25" x 4.25"

Beam Uniformity

<±3%

Beam wavelength

350 ~ 450nm

365nm Intensity

~30mW/cm2

Alignment accuracy

1um

Process resolution

1um@1um PR thickness with vacuum contact

Process mode

Soft, Hard, Vacuum contact & Proximity

Substrate chuck moving

x,y,z & θ

Options

Anti-Vibration table
UV Intensity meter
UV-LED(365nm) exposure module
etc.

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