MDA-400LJ

MDA-400LJ

详细说明

 


    MDA-400LJ价格低廉,未使用水银灯光源,而使用UV LED(365nm),从而无需更换灯,并可实现从碎片到最大4英寸试料的工程。其中设备尺寸小,操作方便,适用于学校研究室。


Type

Fully manual

Mask size

up to 5" x 5"

Substrate size

piece to 4" dia

UV lamp & Power

UV-LED & power supply

Uniform beam size

125mm dia

Beam Uniformity

<±3%

Beam wavelength

365nm Only

365nm Intensity

~20mW/cm2

Alignment accuracy

1um

Process resolution

1um@1um PR thickness with vacuum contact

Process mode

Soft, Hard, Vacuum contact & Proximity

Substrate chuck moving

x,y,z & θ

Options

etc.

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