MDA-12FA

MDA-12FA

详细说明

    MDA-12FA为全自动设备,是12"尺寸试料量产专用型号,性价比高,适用于企业量产线上

Type

Full automatic

Mask size

up to 14" x 14"

Substrate size

12" circle

UV lamp & Power

5kW lamp & power supply

Uniform beam size

13.25" x 13.25"

Beam Uniformity

<±5%

Beam wavelength

350 ~ 450nm

365nm Intensity

25~60mW/cm2 (5kW)

Alignment accuracy

1um

Process resolution

1um@1um PR thickness with vacuum contact

Process mode

Soft, Hard, Vacuum contact & Proximity

Substrate chuck moving

x,y,z & θ (Motorized)

Pre-aligner

±50um

Frame

Anti-Vibration system

Options

UV Intensity meter
etc.
上一条: MDA-400LJ 下一条: MDA-80FA