MDA-80FA

MDA-80FA

详细说明

    80-FA为全自动设备,是8"尺寸试料量产专用型号,性价比高,适用于企业量产线上。

Type

Full automatic

Mask size

up to 9" x 9"

Substrate size

8"

UV lamp & Power

2kW & power supply

Uniform beam size

10.25" x 10.25"

Beam Uniformity

<±5%

Beam wavelength

350 ~ 450nm

365nm Intensity

~25mW/cm2

Alignment accuracy

1um

Process resolution

1um@1um PR thickness with vacuum contact

Process mode

Soft, Hard, Vacuum contact & Proximity

Substrate chuck moving

x,y,z & θ (Motorized)

Pre-aligner

±50um

Frame

Anti-Vibration system

Options

UV Intensity meter
etc.
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