MDA-40F

MDA-40F

详细说明

       MDA-40FA为全自动设备,是2"4"6"尺寸试料量产专用型号,性价比高,适用于企业量产线上。


Type

Full automatic

Mask size

up to 5" x 5"

Substrate size

2", 4"

UV lamp & Power

350W & power supply

Uniform beam size

6.25" x 6.25"

Beam Uniformity

<±3%

Beam wavelength

350 ~ 450nm

365nm Intensity

~25mW/cm2

Alignment accuracy

1um

Process resolution

1um@1um PR thickness with vacuum contact

Process mode

Soft, Hard, Vacuum contact & Proximity

Substrate chuck moving

x,y,z & θ (Motorized)

Pre-aligner

±50um

Frame

Anti-Vibration system

Options

UV Intensity meter

UV-LED(365nm) exposure module

etc.

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